JPH0729452Y2 - 変位測定装置 - Google Patents

変位測定装置

Info

Publication number
JPH0729452Y2
JPH0729452Y2 JP1988041111U JP4111188U JPH0729452Y2 JP H0729452 Y2 JPH0729452 Y2 JP H0729452Y2 JP 1988041111 U JP1988041111 U JP 1988041111U JP 4111188 U JP4111188 U JP 4111188U JP H0729452 Y2 JPH0729452 Y2 JP H0729452Y2
Authority
JP
Japan
Prior art keywords
light
measurement
measuring device
photodetector
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988041111U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01144809U (en]
Inventor
憲司 松丸
貴廣 中村
敦郎 田沼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP1988041111U priority Critical patent/JPH0729452Y2/ja
Publication of JPH01144809U publication Critical patent/JPH01144809U/ja
Application granted granted Critical
Publication of JPH0729452Y2 publication Critical patent/JPH0729452Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Measurement Of Optical Distance (AREA)
JP1988041111U 1988-03-30 1988-03-30 変位測定装置 Expired - Lifetime JPH0729452Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988041111U JPH0729452Y2 (ja) 1988-03-30 1988-03-30 変位測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988041111U JPH0729452Y2 (ja) 1988-03-30 1988-03-30 変位測定装置

Publications (2)

Publication Number Publication Date
JPH01144809U JPH01144809U (en]) 1989-10-04
JPH0729452Y2 true JPH0729452Y2 (ja) 1995-07-05

Family

ID=31267562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988041111U Expired - Lifetime JPH0729452Y2 (ja) 1988-03-30 1988-03-30 変位測定装置

Country Status (1)

Country Link
JP (1) JPH0729452Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11245816A (ja) * 1998-03-03 1999-09-14 East Japan Railway Co レール変位量測定装置
US7102123B2 (en) * 2003-10-28 2006-09-05 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Reflective imaging encoder

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540942A (en) * 1978-09-14 1980-03-22 Nec Corp Range finder
DE2853978A1 (de) * 1978-12-14 1980-07-03 Bosch Gmbh Robert Entfernungsmesser
JPS58191915A (ja) * 1982-05-04 1983-11-09 Minolta Camera Co Ltd 光位置センサ
JPS60135714A (ja) * 1983-12-23 1985-07-19 Matsushita Electric Works Ltd 距離センサ
JPH07113548B2 (ja) * 1986-06-19 1995-12-06 株式会社ニコン 表面変位検出装置

Also Published As

Publication number Publication date
JPH01144809U (en]) 1989-10-04

Similar Documents

Publication Publication Date Title
JP3934051B2 (ja) 表面欠陥の測定
JP4130236B2 (ja) 物体表面形状測定方法及び装置
JPH0729452Y2 (ja) 変位測定装置
JP3609559B2 (ja) 位置検出素子及び距離センサ
JPH0725618Y2 (ja) 変位測定装置
JPS61112905A (ja) 光応用計測装置
JP3491988B2 (ja) レーザードップラー速度計
JP2565274B2 (ja) 高さ測定装置
JPS63225116A (ja) 光学式変位測定装置
JPS5928608A (ja) 溶接線検出装置
JP2588679Y2 (ja) 表面粗さ検査装置
JPH0285704A (ja) 間隙測定装置
JPH0357914A (ja) 光学式プローブ
JPH0495859A (ja) プリント板光学検査装置
JPH0678889B2 (ja) 高さ測定装置
JPH06129840A (ja) 表面測定装置
JPH05231834A (ja) 三次元形状測定装置
JP2502413B2 (ja) 非接触変位測定装置
JPS5826325Y2 (ja) 位置検出装置
JPH0726648Y2 (ja) 変位測定装置
JPH0642944A (ja) 表面粗さ測定装置
JPS6253049B2 (en])
JPS63236909A (ja) 形状測定装置
JPS62245932A (ja) 光検出装置
JPH07167623A (ja) Icリード高さ測定装置