JPH0729452Y2 - 変位測定装置 - Google Patents
変位測定装置Info
- Publication number
- JPH0729452Y2 JPH0729452Y2 JP1988041111U JP4111188U JPH0729452Y2 JP H0729452 Y2 JPH0729452 Y2 JP H0729452Y2 JP 1988041111 U JP1988041111 U JP 1988041111U JP 4111188 U JP4111188 U JP 4111188U JP H0729452 Y2 JPH0729452 Y2 JP H0729452Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measurement
- measuring device
- photodetector
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 27
- 238000005259 measurement Methods 0.000 claims description 41
- 238000003384 imaging method Methods 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988041111U JPH0729452Y2 (ja) | 1988-03-30 | 1988-03-30 | 変位測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988041111U JPH0729452Y2 (ja) | 1988-03-30 | 1988-03-30 | 変位測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01144809U JPH01144809U (en]) | 1989-10-04 |
JPH0729452Y2 true JPH0729452Y2 (ja) | 1995-07-05 |
Family
ID=31267562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988041111U Expired - Lifetime JPH0729452Y2 (ja) | 1988-03-30 | 1988-03-30 | 変位測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0729452Y2 (en]) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11245816A (ja) * | 1998-03-03 | 1999-09-14 | East Japan Railway Co | レール変位量測定装置 |
US7102123B2 (en) * | 2003-10-28 | 2006-09-05 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Reflective imaging encoder |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5540942A (en) * | 1978-09-14 | 1980-03-22 | Nec Corp | Range finder |
DE2853978A1 (de) * | 1978-12-14 | 1980-07-03 | Bosch Gmbh Robert | Entfernungsmesser |
JPS58191915A (ja) * | 1982-05-04 | 1983-11-09 | Minolta Camera Co Ltd | 光位置センサ |
JPS60135714A (ja) * | 1983-12-23 | 1985-07-19 | Matsushita Electric Works Ltd | 距離センサ |
JPH07113548B2 (ja) * | 1986-06-19 | 1995-12-06 | 株式会社ニコン | 表面変位検出装置 |
-
1988
- 1988-03-30 JP JP1988041111U patent/JPH0729452Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01144809U (en]) | 1989-10-04 |
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